vertical scanning

The result of Scanning Electron Microscopy ( SEM) measurement show that the micro-gear with smooth surface and vertical sidewall, the thickness and diameter of the micro-gear is 270 μ m and 12 μ m.

扫描电子显微镜（SEM）测量表明，所得的微齿轮直径270μm左右，厚度12μm左右，表面平整，侧壁陡直。

The hardware system of three-dimension scanning of interferometer was designed. The scanning precision of two-dimension horizontal system and the structure and precision of vertical PZT system were analyzed.

叙述了三维扫描系统的硬件实现，分析了二维水平扫描系统的扫描精度和垂直压电陶瓷微位移系统的结构和精度。

The phase-shift technology is applied to monochromatic light interferometry measurement, time-average interferometry measurement and white-light vertical scanning interferometry measurement respectively. By this way, phase information of interferometric fringe can be modulated, which is used in the analysis of MEMS dynamic behaviors.

将相移技术分别应用在单色光干涉测量、时间平均干涉测量以及白光垂直扫描干涉测量中，实现了对干涉条纹相位信息的调制，可以用于MEMS器件运动特性的分析中；

Objective The purpose Appraising spiral CT's convention scanning to combine thin layer of target scanning and arrow form bit to rebuild, whether or not the vertical ligament burst the diagnosis value after the dish is protruding to between the lumbar vertebra.

评价螺旋CT常规扫描结合薄层靶扫描及矢状位重建，对腰椎间盘突出后纵韧带破裂的诊断价值。

The Value of Vertical to Clivus CT Scanning in Diagnosing Tentorial Hernia in the Patient with Brain Trauma

斜坡垂线扫描法对脑外伤并天幕疝诊断价值的研究